Formula: Ti
Alias / Keywords: Titanium Target, Titanium Metal Target, Titanium Sputtering Target, Titanium Metal Sputtering Target, Ti Target, Ti Metal Target, Ti Sputtering Target, Ti Metal Sputtering Target
.
Grade: Various
Shape: round, square, or customized
Diameter: 1", 2", 3", 4", 5", 10", 20" or larger
Square (mm): 10x10, 20x20, 50x50, 100x100, 250x250, 1000x1000 or larger
Thickness: 1/8", 1/4", 1/2", 5mm, 10mm, 20mm...
Special requirement is welcome, we may supply the target according to customer's design.
| Element |
Composition, % |
| Grade 1 |
Grade 2 |
Grade 3 |
Grade 4 |
Grade 5 |
Grade 6 |
Grade 7 |
Grade 9 |
Grade 11 |
Grade 12 |
Grade 13 |
| N, max. |
0.03 |
0.03 |
0.05 |
0.05 |
0.05 |
0.03 |
0.03 |
0.03 |
0.03 |
0.03 |
0.03 |
| C, max. |
0.08 |
0.08 |
0.08 |
0.08 |
0.08 |
0.08 |
0.08 |
0.08 |
0.08 |
0.08 |
0.08 |
| H, max. |
0.015 |
0.015 |
0.015 |
0.015 |
0.015 |
0.015 |
0.015 |
0.015 |
0.015 |
0.015 |
0.015 |
| Fe, max. |
0.20 |
0.30 |
0.30 |
0.50 |
0.40 |
0.50 |
0.30 |
0.25 |
0.20 |
0.30 |
0.20 |
| O, max. |
0.18 |
0.25 |
0.35 |
0.40 |
0.20 |
0.20 |
0.25 |
0.15 |
0.18 |
0.25 |
0.10 |
| Al |
-- |
-- |
-- |
-- |
5.5-6.75 |
4.0-6.0 |
-- |
2.5-3.5 |
-- |
-- |
-- |
| V |
-- |
-- |
-- |
-- |
3.5-4.5 |
-- |
-- |
2.0-3.0 |
-- |
-- |
-- |
| Sn |
-- |
-- |
-- |
-- |
-- |
2.0-3.0 |
-- |
-- |
-- |
-- |
-- |
| Ru |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
0.04-0.06 |
| Pd |
-- |
-- |
-- |
-- |
-- |
-- |
0.12-0.25 |
-- |
0.12-0.25 |
-- |
-- |
| Co |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
| Mo |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
0.2-0.4 |
-- |
| Cr |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
| Ni |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
0.6-0.9 |
0.4-0.6 |
| Zr |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
| Si |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
-- |
| Residuals, max each |
0.1 |
0.1 |
0.1 |
0.1 |
0.1 |
0.1 |
0.1 |
0.1 |
0.1 |
0.1 |
0.1 |
| Residuals, max total |
0.4 |
0.4 |
0.4 |
0.4 |
0.4 |
0.4 |
0.4 |
0.4 |
0.4 |
0.4 |
0.4 |
| Ti |
balance |
balance |
balance |
balance |
balance |
balance |
balance |
balance |
balance |
balance |
balance |
.
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