Formula: Sc
Alias / Keywords: Scandium Target, Scandium Metal Target, Scandium Sputtering Target, Scandium Metal Sputtering Target, Sc Target, Sc Metal Target, Sc Sputtering Target, Sc Metal Sputtering Target
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Grade: 99.9-99.99%
Shape: round, square, or customized
Diameter: 1", 2", 3", 4", 5", 10" or larger
Square: 50mm x50mm, 100mm x 100mm, 250mm x 250mm or larger
Thickness: 1/8", 1/4", 1/2", 5mm, 10mm, 20mm...
Special requirement is welcome, we may supply the target according to customer's design.
Main content (% min.) |
Rare Earth Impurities (in TREM, ppm max.) |
Non-Rare Earth Impurities (ppm max.) |
Sc/TREM |
TREM* |
La |
Ce |
Pr |
Nd |
Sm |
Eu |
Gd |
Tb |
Dy |
Ho |
Er |
Tm |
Yb |
Lu |
Y |
Fe |
Si |
Ca |
Al |
Mg |
W |
O |
C |
Cl |
99.99 (sublimed) |
99.9 |
5 |
5 |
5 |
5 |
5 |
5 |
5 |
5 |
5 |
5 |
3 |
3 |
3 |
3 |
3 |
300 |
50 |
50 |
10 |
50 |
10 |
150 |
50 |
50 |
99.99 |
99 |
5 |
5 |
5 |
5 |
5 |
5 |
5 |
5 |
5 |
5 |
3 |
3 |
3 |
3 |
5 |
1000 |
100 |
1500 |
100 |
100 |
1000 |
3000 |
100 |
300 |
99.9 |
99 |
300 |
300 |
300 |
300 |
300 |
300 |
300 |
500 |
500 |
300 |
300 |
300 |
300 |
300 |
1 |
1500 |
100 |
1500 |
100 |
100 |
3000 |
3000 |
100 |
100 |
[*]TREM: total rare earth metal
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